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1 . Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249
Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249

(MRS Proceedings)

Edited by J. W. Bartha, C. L. Borst, D. DeNardis, K. Kim, A. Naeemi, A. Nelson, S. S. Papa Rao, H. W. Ro, D. Toma

Publisher: Materials Research Society

Hardback

Publication date: October 2010

Deastore.com price (info) $ 142.56

Usually shipped within: (info) 15 working days

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